- 专利标题: Semiconductor package and manufacturing method thereof
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申请号: US16885297申请日: 2020-05-28
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公开(公告)号: US11515274B2公开(公告)日: 2022-11-29
- 发明人: Fang-Yu Liang , Hsiu-Jen Lin , Kai-Chiang Wu , Chih-Chiang Tsao
- 申请人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 申请人地址: TW Hsinchu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsinchu
- 代理机构: JCIPRNET
- 主分类号: H01L23/00
- IPC分类号: H01L23/00 ; H01L23/538 ; H01L23/498
摘要:
A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes a semiconductor die laterally covered by an insulating encapsulation, a first redistribution structure disposed on the semiconductor die and the insulating encapsulation, a second redistribution structure disposed opposite to the first redistribution structure, and a through insulating via (TIV) penetrating through the insulating encapsulation. The semiconductor die is electrically coupled to the first redistribution structure through the second redistribution structure and the TIV. The first redistribution structure includes a patterned conductive layer covered by a patterned dielectric layer, and under-ball metallurgy (UBM) pattern partially covered by the patterned dielectric layer. A first portion of the UBM pattern physically contacts a via portion of the patterned conductive layer which is tapered toward the UBM pattern, and a second portion of the UBM pattern is connected to the first portion and protruded from the patterned dielectric layer.
公开/授权文献
- US20210375809A1 SEMICONDUCTOR PACKAGE AND MANUFACTURING METHOD THEREOF 公开/授权日:2021-12-02
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