公开(公告)号：US12080563B2

公开(公告)日：2024-09-03

申请号：US17994841

申请日：2022-11-28

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chien-Hsun Chen ,  Yu-Min Liang ,  Yen-Ping Wang ,  Jiun Yi Wu ,  Chen-Hua Yu ,  Kai-Chiang Wu

IPC分类号： H01L21/48 ,  H01L21/56 ,  H01L21/683 ,  H01L21/768 ,  H01L23/00 ,  H01L23/31 ,  H01L23/48 ,  H01L23/498 ,  H01L23/522 ,  H01L23/538

CPC分类号： H01L21/486 ,  H01L21/56 ,  H01L21/76898 ,  H01L23/3121 ,  H01L23/481 ,  H01L23/5226

摘要： Interconnect devices, packaged semiconductor devices and methods are disclosed herein that are directed towards embedding a local silicon interconnect (LSI) device and through substrate vias (TSVs) into system on integrated substrate (SoIS) technology with a compact package structure. The LSI device may be embedded into SoIS technology with through substrate via integration to provide die-to-die FL connection arrangement for super large integrated Fan-Out (InFO) for SBT technology in a SoIS device. Furthermore, the TSV connection layer may be formed using lithographic or photoresist-defined vias to provide eLSI P/G out to a ball-grid-array (BGA) connection interface.

公开(公告)号：US20230091737A1

公开(公告)日：2023-03-23

申请号：US17994841

申请日：2022-11-28

申请人： Taiwan Semiconductor Manufacturing Co.,Ltd.

发明人： Chien-Hsun Chen ,  Yu-Min Liang ,  Yen-Ping Wang ,  Jiun Yi Wu ,  Chen-Hua Yu ,  Kai-Chiang Wu

IPC分类号： H01L21/48 ,  H01L21/56 ,  H01L23/522 ,  H01L23/31 ,  H01L23/48 ,  H01L21/768

摘要： Interconnect devices, packaged semiconductor devices and methods are disclosed herein that are directed towards embedding a local silicon interconnect (LSI) device and through substrate vias (TSVs) into system on integrated substrate (SoIS) technology with a compact package structure. The LSI device may be embedded into SoIS technology with through substrate via integration to provide die-to-die FL connection arrangement for super large integrated Fan-Out (InFO) for SBT technology in a SoIS device. Furthermore, the TSV connection layer may be formed using lithographic or photoresist-defined vias to provide eLSI P/G out to a ball-grid-array (BGA) connection interface.

公开(公告)号：US20220246559A1

公开(公告)日：2022-08-04

申请号：US17727242

申请日：2022-04-22

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chung-Hao Tsai ,  Chia-Chia Lin ,  Kai-Chiang Wu ,  Chuei-Tang Wang ,  Chen-Hua Yu

IPC分类号： H01L23/00 ,  H01L21/56 ,  H01L23/31 ,  H01L21/48 ,  H01L23/522 ,  H01L23/66 ,  H01L23/498 ,  H01L23/48 ,  H01L25/07 ,  H01L23/525 ,  H01L49/02 ,  H01L23/14 ,  H01L25/065

摘要： An embodiment is a device including an integrated circuit die having an active side and a back side, the back side being opposite the active side, a molding compound encapsulating the integrated circuit die, and a first redistribution structure overlying the integrated circuit die and the molding compound, the first redistribution structure including a first metallization pattern and a first dielectric layer, the first metallization pattern being electrically coupled to the active side of the integrated circuit die, at least a portion of the first metallization pattern forming an inductor.

公开(公告)号：US11239096B2

公开(公告)日：2022-02-01

申请号：US16991010

申请日：2020-08-11

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Kai-Chiang Wu ,  Chung-Hao Tsai ,  Chun-Lin Lu ,  Yen-Ping Wang ,  Che-Wei Hsu

IPC分类号： H01L21/56 ,  H01L21/768 ,  H01L23/29 ,  H01L23/31 ,  H01L23/00 ,  H01L21/78 ,  H01L23/498

摘要： An integrated fan-out package includes a first redistribution structure, a die, an insulation encapsulation, and at least one first through interlayer via. The first redistribution structure includes a dielectric layer, a feed line at least partially disposed on the dielectric layer and a signal enhancement layer covering the feed line, wherein the signal enhancement layer has a lower dissipation factor (Df) and/or a lower permittivity (Dk) than the dielectric layer. The die is disposed on the first redistribution structure. The insulation encapsulation encapsulates the die. The at least one first TIV is embedded in the insulation encapsulation and the signal enhancement layer.

公开(公告)号：US20210296221A1

公开(公告)日：2021-09-23

申请号：US16827595

申请日：2020-03-23

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Ching-Feng Yang ,  Hsin-Yu Pan ,  Kai-Chiang Wu ,  Chien-Chang Lin

IPC分类号： H01L23/498 ,  H01L21/48 ,  H01L21/52 ,  H01L23/16

摘要： A semiconductor package includes a circuit board structure, a redistribution layer structure, a package structure, and a ring structure. The redistribution layer structure has a first region and a second region surrounding the first region. The redistribution layer structure is disposed over and electrically connected to the circuit board structure. A metal density in the second region is greater than a metal density in the first region. The package structure is disposed over the first region of the redistribution layer structure. The package structure is electrically connected to the redistribution layer structure. The ring structure is disposed over the second region of the redistribution layer structure.

公开(公告)号：US11094642B2

公开(公告)日：2021-08-17

申请号：US16848863

申请日：2020-04-15

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Fang-Yu Liang ,  Kai-Chiang Wu

IPC分类号： H01L23/538 ,  H01L23/31 ,  H01L21/48 ,  H01L21/56 ,  H01L23/00 ,  H01L21/683 ,  H01Q1/22 ,  H01L23/66 ,  H01Q9/18 ,  H01Q21/28 ,  H01Q21/00 ,  H01Q25/00 ,  H01Q21/06

摘要： A package structure including a semiconductor die, a redistribution layer, a plurality of antenna patterns, a die attach film, and an insulating encapsulant is provided. The semiconductor die has an active surface and a backside surface opposite to the active surface. The redistribution layer is located on the active surface of the semiconductor die and electrically connected to the semiconductor die. The antenna patterns are located over the backside surface of the semiconductor die. The die attach film is located in between the semiconductor die and the antenna patterns, wherein the die attach film includes a plurality of fillers, and an average height of the die attach film is substantially equal to an average diameter of the plurality of fillers. The insulating encapsulant is located in between the redistribution layer and the antenna patterns, wherein the insulating encapsulant encapsulates the semiconductor die and the die attach film.

公开(公告)号：US20210184335A1

公开(公告)日：2021-06-17

申请号：US16997958

申请日：2020-08-20

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Yen-Ping Wang ,  Chun-Lin Lu ,  Han-Ping Pu ,  Kai-Chiang Wu ,  Chung-Yi Hsu

IPC分类号： H01Q1/22 ,  H01L23/66 ,  H01L23/31 ,  H01Q9/04

摘要： A semiconductor package and a manufacturing method thereof are provided. The semiconductor package includes: patch antennas, encapsulated by a first encapsulant; a device die, vertically spaced apart from the patch antennas, and electrically coupled to the patch antennas; and at least one redistribution structure, disposed between the patch antennas and the device die, and including electromagnetic bandgap (EBG) structures laterally surrounding each of the patch antennas.

公开(公告)号：US11004810B2

公开(公告)日：2021-05-11

申请号：US16714768

申请日：2019-12-15

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Kai-Chiang Wu ,  Chun-Lin Lu ,  Chao-Wen Shih ,  Han-Ping Pu ,  Nan-Chin Chuang

IPC分类号： H01L23/66 ,  H01L23/538 ,  H01L21/48 ,  H01L21/56 ,  H01Q21/06 ,  H01Q1/22 ,  H01L23/31 ,  H01L21/683 ,  H01Q21/28 ,  H01Q1/40

摘要： A semiconductor package structure including an encapsulation body, an RFIC chip, a first antenna structure, and a second antenna structure is provided. The RFIC chip may be embedded in the encapsulation body. The first antenna structure may be disposed at a lateral side of the RFIC chip, electrically connected to the RFIC chip, and include a first conductor layer and a plurality of first patches opposite to the first conductor layer. The second antenna structure may be stacked on the RFIC chip, electrically connected to the RFIC chip, and include a second conductor layer and a plurality of second patches opposite to the second conductor layer. The first patches and the second patches are located at a surface of the encapsulation body. A first distance between the first conductor layer and the first patches is different from a second distance between the second conductor layer and the second patches.

公开(公告)号：US11004799B2

公开(公告)日：2021-05-11

申请号：US16891076

申请日：2020-06-03

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Kai-Chiang Wu ,  Chen-Hua Yu ,  Kuo-Chung Yee

IPC分类号： H01L23/538 ,  H01L23/66 ,  H01L23/367 ,  H01L23/31 ,  H01L21/48 ,  H01L21/56 ,  H01L23/00 ,  H01Q1/22 ,  H01L23/498 ,  H01L21/683 ,  H01Q1/24

摘要： A package structure and the method thereof are provided. The package structure includes a conductive plate, a semiconductor die, a molding compound, and antenna elements. The conductive plate has a first surface, a second surface and a sidewall connecting the first surface and the second surface. The semiconductor die is located on the second surface of the conductive plate. The molding compound laterally encapsulates the semiconductor die and covers the sidewall and a portion of the second surface exposed by the semiconductor die, wherein the first surface of the conductive plate is coplanar with a surface of the molding compound. The antenna elements are located over the first surface of the conductive plate.

公开(公告)号：US20210020560A1

公开(公告)日：2021-01-21

申请号：US16513730

申请日：2019-07-17

申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

发明人： Chuei-Tang Wang ,  Chun-Lin Lu ,  Kai-Chiang Wu

IPC分类号： H01L23/498 ,  H01L23/31 ,  H01L23/00 ,  H01L23/66 ,  H01L21/56 ,  H01L21/683 ,  H01L21/48 ,  H01Q1/22 ,  H01Q9/16 ,  H01Q9/04

摘要： A package structure includes a first RDL structure, a die, an encapsulant, a film, a TIV and a second RDL structure. The die is located over the first RDL structure. The encapsulant laterally encapsulates sidewalls of the die. The film is disposed between the die and the first RDL structure, and between the encapsulant and the first RDL structure. The TIV penetrates through the encapsulant and the film to connect to the first RDL structure. The second RDL structure is disposed on the die, the TIV and the encapsulant and electrically connected to die and the TIV.