Invention Grant
- Patent Title: Method for manufacturing semiconductor package
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Application No.: US16972528Application Date: 2020-01-23
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Publication No.: US11527503B2Publication Date: 2022-12-13
- Inventor: You Jin Kyung , Minsu Jeong , Kwang Joo Lee
- Applicant: LG CHEM, LTD.
- Applicant Address: KR Seoul
- Assignee: LG CHEM, LTD.
- Current Assignee: LG CHEM, LTD.
- Current Assignee Address: KR Seoul
- Agency: Rothwell, Figg, Ernst & Manbeck, P.C.
- Priority: KR10-2019-0011317 20190129,KR10-2020-0008888 20200122
- International Application: PCT/KR2020/001154 WO 20200123
- International Announcement: WO2020/159158 WO 20200806
- Main IPC: H01L21/30
- IPC: H01L21/30 ; H01L23/00

Abstract:
The present disclosure relates to a method for manufacturing a semiconductor package including vacuum-laminating a non-conductive film on a substrate on which a plurality of through silicon vias are provided and bump electrodes are formed, and then performing UV irradiation, wherein an increase in melt viscosity before and after UV irradiation can be adjusted to 30% or less, whereby a bonding can be performed without voids during thermo-compression bonding, and resin-insertion phenomenon between solders can be prevented, fillets can be minimized and reliability can be improved.
Public/Granted literature
- US20210313290A1 METHOD FOR MANUFACTURING SEMICONDUCTOR PACKAGE Public/Granted day:2021-10-07
Information query
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