- 专利标题: Method for manufacturing semiconductor package
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申请号: US16972528申请日: 2020-01-23
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公开(公告)号: US11527503B2公开(公告)日: 2022-12-13
- 发明人: You Jin Kyung , Minsu Jeong , Kwang Joo Lee
- 申请人: LG CHEM, LTD.
- 申请人地址: KR Seoul
- 专利权人: LG CHEM, LTD.
- 当前专利权人: LG CHEM, LTD.
- 当前专利权人地址: KR Seoul
- 代理机构: Rothwell, Figg, Ernst & Manbeck, P.C.
- 优先权: KR10-2019-0011317 20190129,KR10-2020-0008888 20200122
- 国际申请: PCT/KR2020/001154 WO 20200123
- 国际公布: WO2020/159158 WO 20200806
- 主分类号: H01L21/30
- IPC分类号: H01L21/30 ; H01L23/00
摘要:
The present disclosure relates to a method for manufacturing a semiconductor package including vacuum-laminating a non-conductive film on a substrate on which a plurality of through silicon vias are provided and bump electrodes are formed, and then performing UV irradiation, wherein an increase in melt viscosity before and after UV irradiation can be adjusted to 30% or less, whereby a bonding can be performed without voids during thermo-compression bonding, and resin-insertion phenomenon between solders can be prevented, fillets can be minimized and reliability can be improved.
公开/授权文献
- US20210313290A1 METHOD FOR MANUFACTURING SEMICONDUCTOR PACKAGE 公开/授权日:2021-10-07
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