Invention Grant
- Patent Title: Integrated circuit structure including asymmetric, recessed source and drain region and method for forming same
-
Application No.: US16806319Application Date: 2020-03-02
-
Publication No.: US11532745B2Publication Date: 2022-12-20
- Inventor: Man Gu , Wenjun Li
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Francois Pagette
- Main IPC: H01L29/772
- IPC: H01L29/772 ; H01L29/78 ; H01L29/66 ; H01L29/165

Abstract:
Integrated circuit (IC) structures including asymmetric, recessed source and drain regions and methods for forming are provided. In an example, the IC structure includes a substrate, a gate structure over the substrate, first and second spacers contacting respective, opposite sidewalls of the gate structure, and source and drain regions on opposite sides of the gate structure. In one configuration, the source region includes an upper source portion having a first lateral width, and a lower source portion having a second lateral width greater than the first lateral width, and the drain region includes an upper drain portion having a third lateral width, and a lower drain portion having a fourth lateral width that is substantially the same as the third lateral width.
Public/Granted literature
Information query
IPC分类: