- 专利标题: Vertical-cavity surface emitting laser for emitting a single mode laser beam
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申请号: US16932839申请日: 2020-07-20
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公开(公告)号: US11532923B2公开(公告)日: 2022-12-20
- 发明人: Chao-Hsin Wu , Szu-Yu Min , Hao-Tien Cheng
- 申请人: National Taiwan University
- 申请人地址: TW Taipei
- 专利权人: National Taiwan University
- 当前专利权人: National Taiwan University
- 当前专利权人地址: TW Taipei
- 代理商 Winston Hsu
- 主分类号: H01S5/183
- IPC分类号: H01S5/183 ; H01S5/042 ; H01S5/343 ; H01S5/22
摘要:
A vertical-cavity surface emitting laser includes a substrate, a first reflector, an active region, an oxide layer, a second reflector, and a circular metal electrode. The first reflector is formed above the substrate. The active region is formed above the first reflector, and includes at least one quantum well. The at least one quantum well generates a laser beam with a plurality of modes. The oxide layer is formed above the active region and includes an oxide aperture. The second reflector is formed above the oxide layer. The circular metal electrode is formed in a circular concave in the second reflector. The circular metal electrode reflects other modes of the laser beam with the plurality of modes except for a fundamental mode and receive an operational voltage. A window exists between the circular concave and lets the laser beam with the fundamental mode pass.
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