Invention Grant
- Patent Title: Charge-balance power device, and process for manufacturing the charge-balance power device
-
Application No.: US16945220Application Date: 2020-07-31
-
Publication No.: US11538903B2Publication Date: 2022-12-27
- Inventor: Antonello Santangelo , Giuseppe Longo , Lucio Renna
- Applicant: STMicroelectronics S.r.l.
- Applicant Address: IT Agrate Brianza
- Assignee: STMicroelectronics S.r.l.
- Current Assignee: STMicroelectronics S.r.l.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed Intellectual Property Law Group LLP
- Priority: IT102019000013416 20190731
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/265 ; H01L21/266 ; H01L29/10 ; H01L29/66 ; H01L29/78

Abstract:
A charge-balance power device includes a semiconductor body having a first conductivity type. A trench gate extends in the semiconductor body from a first surface toward a second surface. A body region has a second conductivity type that is opposite the first conductivity type, and the body region faces the first surface of the semiconductor body and extends on a first side and a second side of the trench gate. Source regions having the first conductivity type extend in the body region and face the first surface of the semiconductor body. A drain terminal extends on the second surface of the semiconductor body. The device further comprises a first and a second columnar region having the second conductivity, which extend in the semiconductor body adjacent to the first and second sides of the trench gate, and the first and second columnar regions are spaced apart from the body region and from the drain terminal.
Public/Granted literature
- US20210036104A1 CHARGE-BALANCE POWER DEVICE, AND PROCESS FOR MANUFACTURING THE CHARGE-BALANCE POWER DEVICE Public/Granted day:2021-02-04
Information query
IPC分类: