发明授权
- 专利标题: Plating method
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申请号: US17497252申请日: 2021-10-08
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公开(公告)号: US11542619B2公开(公告)日: 2023-01-03
- 发明人: Kazuhito Tsuji
- 申请人: EBARA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: BakerHostetler
- 优先权: JPJP2020-171311 20201009
- 主分类号: C25D5/34
- IPC分类号: C25D5/34 ; C25D7/12 ; C25D21/12 ; C25D17/00
摘要:
An objective of the present invention is to prevent a prewetting liquid from remaining in an edge portion of a substrate. A plating method for subjecting a substrate to a plating treatment is provided, the substrate including a part to be plated that is exposed to a plating solution and an edge portion that is an outer region of the part to be plated. The plating method includes a first sealing step of bringing a first seal body into contact with the substrate to seal the edge portion of the substrate, a prewetting step of subjecting the sealed substrate to a prewetting treatment, a first seal removing step of removing the first seal body from the prewetted substrate, a substrate holding step of holding the substrate with a substrate holder including a second seal body, and a plating step of applying the plating solution to the substrate held by the substrate holder.
公开/授权文献
- US20220112620A1 PLATING METHOD 公开/授权日:2022-04-14
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