Invention Grant
- Patent Title: Vacuum connection mechanism and electron optical device
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Application No.: US16287268Application Date: 2019-02-27
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Publication No.: US11545335B2Publication Date: 2023-01-03
- Inventor: Takashi Ohara , Tsutomu Karimata
- Applicant: EBARA CORPORATION
- Applicant Address: JP Tokyo
- Assignee: EBARA CORPORATION
- Current Assignee: EBARA CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JPJP2018-041762 20180308
- Main IPC: H01J37/26
- IPC: H01J37/26 ; F16L51/03 ; G01N23/225 ; F04D19/04

Abstract:
A vacuum connection mechanism includes: a main body part having a first opening and a first sub opening opened symmetrically in a first direction, and a second opening and a second sub opening opened symmetrically in a second direction; a first bellows connected to the first opening and to the end of which a first flange is provided; a first sub bellows connected to the first sub opening and to the end of which a first blind flange is provided; a first supporting member coupling the first flange and the first blind flange; a second bellows connected to the second opening and to the end of which a second flange is provided; a second sub bellows connected to the second sub opening and to the end of which a second blind flange is provided; and a second supporting member coupling the second flange and the second blind flange.
Public/Granted literature
- US20190279839A1 VACUUM CONNECTION MECHANISM AND ELECTRON OPTICAL DEVICE Public/Granted day:2019-09-12
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