公开(公告)号：US11545335B2

公开(公告)日：2023-01-03

申请号：US16287268

申请日：2019-02-27

Applicant: EBARA CORPORATION

Inventor： Takashi Ohara ,  Tsutomu Karimata

IPC: H01J37/26 ,  F16L51/03 ,  G01N23/225 ,  F04D19/04

Abstract: A vacuum connection mechanism includes: a main body part having a first opening and a first sub opening opened symmetrically in a first direction, and a second opening and a second sub opening opened symmetrically in a second direction; a first bellows connected to the first opening and to the end of which a first flange is provided; a first sub bellows connected to the first sub opening and to the end of which a first blind flange is provided; a first supporting member coupling the first flange and the first blind flange; a second bellows connected to the second opening and to the end of which a second flange is provided; a second sub bellows connected to the second sub opening and to the end of which a second blind flange is provided; and a second supporting member coupling the second flange and the second blind flange.