Invention Grant
- Patent Title: Organic vapor jet nozzle with shutter
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Application No.: US16821416Application Date: 2020-03-17
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Publication No.: US11552247B2Publication Date: 2023-01-10
- Inventor: Stephen R. Forrest , Jeffrey A. Horowitz , David J. Bishop
- Applicant: The Regents of the University of Michigan , Trustees of Boston University
- Applicant Address: US MI Ann Arbor; US MA Boston
- Assignee: The Regents of the University of Michigan,Trustees of Boston University
- Current Assignee: The Regents of the University of Michigan,Trustees of Boston University
- Current Assignee Address: US MI Ann Arbor; US MA Boston
- Agency: Riverside Law LLP
- Main IPC: H01L29/08
- IPC: H01L29/08 ; H01L51/00 ; H01L51/56 ; B81B7/00 ; H01L51/52

Abstract:
An organic vapor deposition device comprises a print head, comprising a source channel, in fluid communication with a flow of carrier gas and a quantity of organic source material configured to mix with the carrier gas, a nozzle having a deposition outlet, in fluid communication with the source channel, and a shutter configured at least to open and close the deposition outlet, wherein the print heat is configured to allow the flow of carrier gas and the organic source material exit the deposition outlet when the shutter is in an open position, and to prevent the flow of carrier gas and the organic source material from exiting the deposition outlet when the shutter is in a closed position. A method of manufacturing a device comprising an organic feature on a substrate is also described.
Public/Granted literature
- US20200303645A1 ORGANIC VAPOR JET NOZZLE WITH SHUTTER Public/Granted day:2020-09-24
Information query
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