Organic vapor jet nozzle with shutter

    公开(公告)号:US11552247B2

    公开(公告)日:2023-01-10

    申请号:US16821416

    申请日:2020-03-17

    摘要: An organic vapor deposition device comprises a print head, comprising a source channel, in fluid communication with a flow of carrier gas and a quantity of organic source material configured to mix with the carrier gas, a nozzle having a deposition outlet, in fluid communication with the source channel, and a shutter configured at least to open and close the deposition outlet, wherein the print heat is configured to allow the flow of carrier gas and the organic source material exit the deposition outlet when the shutter is in an open position, and to prevent the flow of carrier gas and the organic source material from exiting the deposition outlet when the shutter is in a closed position. A method of manufacturing a device comprising an organic feature on a substrate is also described.

    ORGANIC VAPOR JET NOZZLE WITH SHUTTER
    3.
    发明申请

    公开(公告)号:US20200303645A1

    公开(公告)日:2020-09-24

    申请号:US16821416

    申请日:2020-05-05

    IPC分类号: H01L51/00 H01L51/56 B81B7/00

    摘要: An organic vapor deposition device comprises a print head, comprising a source channel, in fluid communication with a flow of carrier gas and a quantity of organic source material configured to mix with the carrier gas, a nozzle having a deposition outlet, in fluid communication with the source channel, and a shutter configured at least to open and close the deposition outlet, wherein the print heat is configured to allow the flow of carrier gas and the organic source material exit the deposition outlet when the shutter is in an open position, and to prevent the flow of carrier gas and the organic source material from exiting the deposition outlet when the shutter is in a closed position. A method of manufacturing a device comprising an organic feature on a substrate is also described.