Invention Grant
- Patent Title: In-situ method and apparatus for measuring fluid resistivity
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Application No.: US17067344Application Date: 2020-10-09
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Publication No.: US11555730B2Publication Date: 2023-01-17
- Inventor: Douglas A. Buchberger, Jr. , Gautam Pisharody , Lancelot Huang
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: G01F23/24
- IPC: G01F23/24 ; G01F25/10

Abstract:
A method and apparatus for determining particle contamination of a process fluid is disclosed herein. In one example, a fluid resistivity measurement probe is provided. The system includes an upstream fluid conduit, a downstream fluid conduit, and a measuring section. The measuring section has a metal rod, and a ground electrode. The ground electrode surrounds and is coaxial with the metal rod. The upstream fluid conduit is coupled to a first end of the ground electrode. The downstream fluid conduit is coupled to a second end of the ground electrode. The metal rod and the ground electrode define a space therebetween. The space flows a fluid from the upstream fluid conduit to the downstream fluid conduit.
Public/Granted literature
- US20220113177A1 IN-SITU METHOD AND APPARATUS FOR MEASURING FLUID RESISTIVITY Public/Granted day:2022-04-14
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