公开(公告)号：US11609505B2

公开(公告)日：2023-03-21

申请号：US17222696

申请日：2021-04-05

Applicant: Applied Materials, Inc.

Inventor： Mangesh Ashok Bangar ,  Gautam Pisharody ,  Lancelot Huang ,  Alan L. Tso ,  Douglas A. Buchberger, Jr. ,  Huixiong Dai ,  Dmitry Lubomirsky ,  Srinivas D. Nemani ,  Christopher Siu Wing Ngai

IPC: G03F7/20 ,  G01N27/10

Abstract: Embodiments of the present disclosure generally relate to apparatus and methods for verification and re-use of process fluids. The apparatus generally includes a tool for performing lithography, and a recirculation path coupled to the tool. The recirculation path generally includes a collection unit coupled at first end to a first end of the tool, and a probe coupled at a first end to a second end of the collection unit, the probe for determining one or more characteristics of a fluid flowing from the tool. The recirculation path of the apparatus further generally includes a purification unit coupled at a first end to a third end of the collection unit, the purification unit further coupled at a second end to a second end of the probe, the purification unit for changing a characteristic of the fluid.

公开(公告)号：US11555730B2

公开(公告)日：2023-01-17

申请号：US17067344

申请日：2020-10-09

Applicant: Applied Materials, Inc.

Inventor： Douglas A. Buchberger, Jr. ,  Gautam Pisharody ,  Lancelot Huang

IPC: G01F23/24 ,  G01F25/10

Abstract: A method and apparatus for determining particle contamination of a process fluid is disclosed herein. In one example, a fluid resistivity measurement probe is provided. The system includes an upstream fluid conduit, a downstream fluid conduit, and a measuring section. The measuring section has a metal rod, and a ground electrode. The ground electrode surrounds and is coaxial with the metal rod. The upstream fluid conduit is coupled to a first end of the ground electrode. The downstream fluid conduit is coupled to a second end of the ground electrode. The metal rod and the ground electrode define a space therebetween. The space flows a fluid from the upstream fluid conduit to the downstream fluid conduit.