Invention Grant
- Patent Title: Particle yield via beam-line pressure control
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Application No.: US17351842Application Date: 2021-06-18
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Publication No.: US11562885B2Publication Date: 2023-01-24
- Inventor: Thomas Stacy , Jay T. Scheuer , Eric D. Hermanson , Bon-Woong Koo , Tseh-Jen Hsieh
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: KDB Firm PLLC
- Main IPC: H01J37/05
- IPC: H01J37/05 ; H01J37/301 ; H01J37/317

Abstract:
A beamline ion implanter and a method of operating a beamline ion implanter. A method may include performing an ion implantation procedure during a first time period on a first set of substrates, in a process chamber of the ion implanter, and performing a first pressure-control routine during a second time period by: introducing a predetermined gas to reach a predetermined pressure into at least a downstream portion of the beam-line for a second time period. The method may include, after completion of the first pressure-control routine, performing the ion implantation procedure on a second set of substrates during a third time period.
Public/Granted literature
- US20220037114A1 PARTICLE YIELD VIA BEAM-LINE PRESSURE CONTROL Public/Granted day:2022-02-03
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