Invention Grant
- Patent Title: Substrate processing apparatus
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Application No.: US17108530Application Date: 2020-12-01
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Publication No.: US11569111B2Publication Date: 2023-01-31
- Inventor: Alexander Krupyshev , Joseph Hallisey , Kevin Bourbeau , Emilien Audebrand
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/677
- IPC: H01L21/677

Abstract:
A substrate transport apparatus having a drive section and at least one articulated multi-link arm having an upper arm joined at one end to the drive section and a forearm joined to the upper arm. The upper arm being a substantially rigid unarticulated link. Dual end effector links that are separate and distinct from each other are each rotatably and separately joined to a common end of the forearm about a common axis of rotation. Each end effector link has at least one holding station. The holding station of at least one end effector link includes one holding station at opposite ends of the at least one end effector link that is substantially rigid and unarticulated between the opposite ends, and the holding station at one of the opposite ends is substantially coplanar with the holding station of each other end effector link.
Public/Granted literature
- US20210183675A1 SUBSTRATE PROCESSING APPARATUS Public/Granted day:2021-06-17
Information query
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