Invention Grant
- Patent Title: Memory device comprising a top via electrode and methods of making such a memory device
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Application No.: US16855745Application Date: 2020-04-22
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Publication No.: US11569437B2Publication Date: 2023-01-31
- Inventor: Yanping Shen , Halting Wang , Sipeng Gu
- Applicant: GLOBALFOUNDRIES U.S. Inc.
- Applicant Address: US CA Santa Clara
- Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee: GLOBALFOUNDRIES U.S. Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Hoffman Warnick LLC
- Agent Anthony Canale
- Main IPC: H01L43/02
- IPC: H01L43/02 ; H01L27/24 ; H01L27/22 ; H01L27/1159 ; H01L43/08 ; H01L45/00 ; H01L43/12 ; H01L43/10

Abstract:
An illustrative device disclosed herein includes at least one layer of insulating material, a conductive contact structure having a conductive line portion and a conductive via portion and a memory cell positioned in a first opening in the at least one layer of insulating material. In this illustrative example, the memory cell includes a bottom electrode, a memory state material positioned above the bottom electrode and an internal sidewall spacer positioned within the first opening and above at least a portion of the memory state material, wherein the internal sidewall spacer defines a spacer opening and wherein the conductive via portion is positioned within the spacer opening and above a portion of the memory state material.
Public/Granted literature
- US20210336126A1 MEMORY DEVICE COMPRISING A TOP VIA ELECTRODE AND METHODS OF MAKING SUCH A MEMORY DEVICE Public/Granted day:2021-10-28
Information query
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