- 专利标题： Mounting table and charge neutralization method for target object
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申请号： US16688667申请日： 2019-11-19
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公开(公告)号： US11582854B2公开(公告)日： 2023-02-14
- 发明人: Takehiro Ueda
- 申请人： TOKYO ELECTRON LIMITED
- 申请人地址： JP Tokyo
- 专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人： TOKYO ELECTRON LIMITED
- 当前专利权人地址： JP Tokyo
- 代理机构： Weihrouch IP
- 优先权： JPJP2018-216978 20181120
- 主分类号： H05F3/06
- IPC分类号： H05F3/06 ; H01L21/683 ; H01L21/67 ; H01J37/32 ; H01L21/687
摘要：
A mounting table is provided. The mounting table includes an electrostatic chuck configured to mount thereon a target object and attract and hold the target object using an electrostatic force, and a gas supply line configured to supply a gas to a gap between the target object mounted on the electrostatic chuck and the electrostatic chuck via the electrostatic chuck. The mounting table further includes at least one irradiation unit configured to irradiate light having a predetermined wavelength to the gas flowing through the gas supply line or to the gas supplied to the gap between the target object and the electrostatic chuck to ionize the gas.