- 专利标题： Substrate lift mechanism and reactor including same
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申请号： US16944271申请日： 2020-07-31
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公开(公告)号： US11587821B2公开(公告)日： 2023-02-21
- 发明人: Eric Hill , John DiSanto
- 申请人： ASM IP Holding B.V.
- 申请人地址： NL Almere
- 专利权人： ASM IP Holding B.V.
- 当前专利权人： ASM IP Holding B.V.
- 当前专利权人地址： NL Almere
- 代理机构： Snell & Wilmer L.L.P.
- 主分类号： H01L21/67
- IPC分类号： H01L21/67 ; C30B25/08 ; H01L21/687 ; C23C16/458 ; C30B25/12
摘要：
A substrate support assembly suitable for use in a reactor including a common processing and substrate transfer region is disclosed. The substrate support assembly includes a susceptor and one or more lift pins that can be used to lower a substrate onto a surface of the susceptor and raise the substrate from the surface, to allow transfer of the substrate from the processing region, without raising or lowering the susceptor.
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