Invention Grant
- Patent Title: Resonant pressure sensor with imporved linearity
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Application No.: US17854209Application Date: 2022-06-30
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Publication No.: US11592347B2Publication Date: 2023-02-28
- Inventor: Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
- Applicant: YOKOGAWA ELECTRIC CORPORATION
- Applicant Address: JP Tokyo
- Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee: YOKOGAWA ELECTRIC CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Osha Bergman Watanabe & Burton LLP
- Priority: JPJP2020-002784 20200110
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A resonant pressure sensor with improved linearity includes a substrate including a substrate-fixed portion fixed to a housing-fixed portion and a substrate-separated portion separated from the housing-fixed portion in a first direction; a first resonator disposed in the substrate-separated portion to detect a change of a resonance frequency based on a strain caused by static pressure applied by a pressure-receiving fluid interposed in a gap between the housing-fixed portion and the substrate; a first electrode extending along a second direction to output an excitation signal to the first resonator; a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency; and a processor that measures the static pressure based on the detected change.
Public/Granted literature
- US20220349766A1 RESONANT PRESSURE SENSOR Public/Granted day:2022-11-03
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