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公开(公告)号：US20230175908A1
公开(公告)日：2023-06-08
申请号：US18160632
申请日：2023-01-27
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
IPC: G01L9/00
CPC classification number: G01L9/0072
Abstract: A resonant pressure sensor with improved linearity includes: a substrate including a substrate-separated portion separated from a housing-fixed portion; a first resonator that: is disposed in the substrate-separated portion; and detects a change of a first resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a second resonator that: is disposed in the substrate; detects a change of a second resonance frequency based on the strain in the substrate; and has a pressure sensitivity of the second resonance frequency; and a processor that: measures the static pressure based on the detected change of the first resonance frequency; and corrects the static pressure according to internal temperature of the pressure sensor based on a difference between the second resonance frequency and the first resonance frequency.
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公开(公告)号：US20190064023A1
公开(公告)日：2019-02-28
申请号：US16042349
申请日：2018-07-23
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Toru Hirayama , Yusaku Yoshida , Atsushi Yumoto , Tatsuhiko Miyauchi
Abstract: A sensor includes: a pressure vessel filled with an enclosed liquid; a diaphragm that seals the pressure vessel; a sensor body contained in the pressure vessel; an electric wire comprising a wiring electrically connected to the sensor body; a fixture that fixes the electric wire to the pressure vessel; a first fillet at a joining portion between the electric wire and the fixture, wherein the first fillet contacts the enclosed liquid; and a second fillet at a joining portion between the fixture and the pressure vessel, wherein the second fillet contacts the enclosed liquid.
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公开(公告)号：US11592347B2
公开(公告)日：2023-02-28
申请号：US17854209
申请日：2022-06-30
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
IPC: G01L9/00
Abstract: A resonant pressure sensor with improved linearity includes a substrate including a substrate-fixed portion fixed to a housing-fixed portion and a substrate-separated portion separated from the housing-fixed portion in a first direction; a first resonator disposed in the substrate-separated portion to detect a change of a resonance frequency based on a strain caused by static pressure applied by a pressure-receiving fluid interposed in a gap between the housing-fixed portion and the substrate; a first electrode extending along a second direction to output an excitation signal to the first resonator; a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency; and a processor that measures the static pressure based on the detected change.
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公开(公告)号：US20220349766A1
公开(公告)日：2022-11-03
申请号：US17854209
申请日：2022-06-30
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
IPC: G01L9/00
Abstract: A resonant pressure sensor includes: a housing; a housing-fixed portion that is fixed to the housing; a substrate that comprises: a substrate-fixed portion that is fixed to the housing-fixed portion; and a substrate-separated portion that is separated from the housing-fixed portion in a first direction and extends from the substrate-fixed portion; a first resonator that is disposed in the substrate-separated portion and that detects a change of a resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a first electrode that extends along a second direction perpendicular to the first direction and that outputs an excitation signal to the first resonator to excite the first resonator; and a second electrode that extends along the second direction and from which the first resonator outputs a signal having the resonance frequency.
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公开(公告)号：US11428594B2
公开(公告)日：2022-08-30
申请号：US17143517
申请日：2021-01-07
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
IPC: G01L9/00
Abstract: A resonant pressure sensor has high linearity and includes: a housing; and a pressure sensing unit that detects a static pressure based on a change value of a resonance frequency and includes: a housing-fixed portion; a substrate that includes a substrate-fixed portion and a substrate-separated portion; the pressure-receiving fluid that is interposed in a gap between the housing-fixed portion and the substrate and envelops the substrate; and a first resonator that is disposed in the substrate-separated portion and detects the change value of the resonance frequency based on a strain in the substrate caused by the static pressure applied by the pressure-receiving fluid, wherein the first resonator is made of a semiconductor material including an impurity, a concentration of the impurity is 1×1020 (cm−3) or higher, and an atomic radius of the impurity is smaller than an atomic radius of the semiconductor material.
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Patent Agency Ranking
公开(公告)号：US11211916B2
公开(公告)日：2021-12-28
申请号：US15814481
申请日：2017-11-16
Applicant: Yokogawa Electric Corporation
Inventor： Takashi Yoshida , Yusaku Yoshida , Makoto Noro , Atsushi Yumoto , Shuhei Yoshita
Abstract: A resonant transducer includes a resonant beam which is formed on a semiconductor substrate, a support beam of which one end is connected to a part of the resonant beam at a predetermined angle, a first electrode which is connected to the resonant beam via the support beam, a second electrode which is disposed adjacent to a center of one side surface of the resonant beam, and a conductor which is disposed between the support beam and the second electrode, the conductor being connected to the first electrode.
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公开(公告)号：US11815420B2
公开(公告)日：2023-11-14
申请号：US18160632
申请日：2023-01-27
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
IPC: G01L9/00
CPC classification number: G01L9/0072
Abstract: A resonant pressure sensor with improved linearity includes: a substrate including a substrate-separated portion separated from a housing-fixed portion; a first resonator that: is disposed in the substrate-separated portion; and detects a change of a first resonance frequency based on a strain in the substrate caused by static pressure applied by a pressure-receiving fluid; a second resonator that: is disposed in the substrate; detects a change of a second resonance frequency based on the strain in the substrate; and has a pressure sensitivity of the second resonance frequency; and a processor that: measures the static pressure based on the detected change of the first resonance frequency; and corrects the static pressure according to internal temperature of the pressure sensor based on a difference between the second resonance frequency and the first resonance frequency.
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公开(公告)号：US20210215560A1
公开(公告)日：2021-07-15
申请号：US17143517
申请日：2021-01-07
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Shigeto Iwai , Atsushi Yumoto , Makoto Noro , Takashi Yoshida
IPC: G01L9/00
Abstract: An resonant pressure sensor, includes: a housing; a housing-fixed portion that is fixed to the housing; a substrate that includes a substrate-fixed portion that is fixed to the housing-fixed portion and a substrate-separated portion that is separated from the housing-fixed portion and extends from the substrate-fixed portion; a first resonator that is disposed in the substrate-separated portion and that detects a change of a resonance frequency based on a strain in the substrate caused by static pressure applied by the pressure-receiving fluid; and a processor. A pressure-receiving fluid is interposed in a gap between the housing-fixed portion and the substrate and envelops the substrate. The processor measures the static pressure based on the detected change of the resonance frequency.
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公开(公告)号：US11835413B2
公开(公告)日：2023-12-05
申请号：US17566326
申请日：2021-12-30
Applicant: Yokogawa Electric Corporation
Inventor： Takashi Yoshida , Yuusaku Yoshida , Atsushi Yumoto , Yoshitaka Suzuki
CPC classification number: G01L7/082 , G01L7/022 , G01L7/08 , G01L9/0008 , G01L9/0047 , Y10T29/4913
Abstract: A resonant pressure sensor includes a first substrate and a resonator. The first substrate includes a diaphragm and a projection disposed on the diaphragm. The resonator is disposed in the first substrate, a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate. The first substrate is an SOI substrate in which a silicon dioxide layer is inserted between a silicon substrate and a superficial silicon layer. The intermediate level of the first substrate is disposed in the silicon substrate, and the resonator is disposed in the projection included in the superficial silicon layer.
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公开(公告)号：US11243131B2
公开(公告)日：2022-02-08
申请号：US14460684
申请日：2014-08-15
Applicant: YOKOGAWA ELECTRIC CORPORATION
Inventor： Takashi Yoshida , Yuusaku Yoshida , Atsushi Yumoto , Yoshitaka Suzuki
Abstract: A resonant pressure sensor includes a first substrate including a diaphragm and at least one projection disposed on the diaphragm, and at least one resonator disposed in the first substrate, at least a part of the resonator being included in the projection, and the resonator being disposed between a top of the projection and an intermediate level of the first substrate.
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