- 专利标题: Wafer asset modeling using language processing methods
-
申请号: US16933972申请日: 2020-07-20
-
公开(公告)号: US11599690B2公开(公告)日: 2023-03-07
- 发明人: Elham Khabiri , Anuradha Bhamidipaty , Robert Jeffrey Baseman , Chandrasekhara K. Reddy , Srideepika Jayaraman
- 申请人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 代理机构: Intelletek Law Group, PLLC
- 代理商 Gabriel Daniel, Esq.
- 主分类号: G06F30/20
- IPC分类号: G06F30/20 ; G06F30/27 ; G06F40/40 ; G01N21/95 ; G06F111/10
摘要:
A computing device includes a processor and a storage device. A wafer asset modeling module is stored in the storage device and is executed by the processor to configure the computing device to perform acts identifying and clustering a plurality of assets based on static properties of a wafer asset using a first module of the wafer asset modeling module. The clustered plurality of assets is determined based on dynamic properties of the wafer asset using a second module of the wafer asset modeling module. Event prediction is performed by converting a numeric data of the clustered plurality of assets to a natural language processing (NLP) domain by a third module of the wafer asset modeling module. One or more sequence-to-sequence methods are performed to predict a malfunction of a component of the wafer asset and/or an event based on past patterns. Prediction information is stored in the storage device.
公开/授权文献
- US20220019710A1 WAFER ASSET MODELING USING LANGUAGE PROCESSING METHODS 公开/授权日:2022-01-20
信息查询