Invention Grant
- Patent Title: Semiconductor memory device and method of fabricating the same
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Application No.: US17097337Application Date: 2020-11-13
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Publication No.: US11600570B2Publication Date: 2023-03-07
- Inventor: Hyo-Sub Kim , Sohyun Park , Daewon Kim , Dongoh Kim , Eun A Kim , Chulkwon Park , Taejin Park , Kiseok Lee , Sunghee Han
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2020-0032824 20200317
- Main IPC: H01L23/535
- IPC: H01L23/535 ; H01L21/768 ; H01L27/108 ; H01L23/532

Abstract:
A semiconductor memory device is disclosed. The device may include first and second impurity regions provided in a substrate and spaced apart from each other, the second impurity region having a top surface higher than the first impurity region, a device isolation pattern interposed between the first and second impurity regions, a first contact plug, which is in contact with the first impurity region and has a bottom surface lower than the top surface of the second impurity region, a gap-fill insulating pattern interposed between the first contact plug and the second impurity region, a first protection spacer interposed between the gap-fill insulating pattern and the second impurity region, and a first spacer, which is in contact with a side surface of the first contact plug and the device isolation pattern and is interposed between the first protection spacer and the gap-fill insulating pattern.
Public/Granted literature
- US20210296237A1 SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME Public/Granted day:2021-09-23
Information query
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