SEMICONDUCTOR DEVICE INCLUDING CONTACT PLUG
    2.
    发明公开

    公开(公告)号:US20230155024A1

    公开(公告)日:2023-05-18

    申请号:US17969491

    申请日:2022-10-19

    摘要: A semiconductor device includes a semiconductor substrate provided with active regions, an isolation layer defining each active region on the semiconductor substrate, gate electrodes overlapping the active regions and extending in a first direction parallel to an upper surface of the semiconductor substrate, an insulating barrier structure disposed at a level higher than a level of where the gate electrodes are disposed, the insulating barrier structure having a grid pattern including grid cells, bitlines extending in a second direction perpendicular to the first direction and parallel to the upper surface of the semiconductor substrate, and disposed at a level higher than a level of where the insulating barrier structure is disposed, and first contact plugs, each first contact plug being disposed in a corresponding grid cell of the grid cells of the insulating barrier structure.

    Semiconductor devices
    3.
    发明授权

    公开(公告)号:US11037930B2

    公开(公告)日:2021-06-15

    申请号:US16670232

    申请日:2019-10-31

    IPC分类号: H01L27/108

    摘要: A semiconductor device includes a substrate, a bit line structure on the substrate, a contact plug structure being adjacent to the bit line structure and extending in a vertical direction perpendicular to an upper surface of the substrate, and a capacitor electrically connected to the contact plug structure. The contact plug structure includes a lower contact plug, a metal silicide pattern, and an upper contact plug that are sequentially stacked on the substrate. The metal silicide pattern has an L-shaped cross section.

    INTEGRATED CIRCUIT DEVICE
    4.
    发明公开

    公开(公告)号:US20240324183A1

    公开(公告)日:2024-09-26

    申请号:US18489034

    申请日:2023-10-18

    IPC分类号: H10B12/00

    摘要: An integrated circuit device includes a substrate having an active area, a plurality of bit line structures on the substrate, the plurality of bit line structures including insulating spacers on sidewalls thereof, a buried contact between the plurality of bit line structures and electrically connected to the active area, an insulation capping pattern on a bit line structure of the plurality of bit line structures, and a landing pad electrically connected to the buried contact, the landing pad arranged to vertically overlap the bit line structure on the insulation capping pattern, wherein an uppermost surface of the landing pad is higher than an uppermost surface of the insulation capping pattern, relative to the substrate.

    SEMICONDUCTOR DEVICES
    7.
    发明公开

    公开(公告)号:US20230145857A1

    公开(公告)日:2023-05-11

    申请号:US17935119

    申请日:2022-09-25

    IPC分类号: H01L27/108 G11C5/06

    CPC分类号: H01L27/10814 G11C5/063

    摘要: A semiconductor device includes a conductive contact plug disposed on a substrate, a bit line structure disposed on the conductive contact plug, first and second spacers, and a capping pattern disposed on the first and second spacers. The conductive contact plug includes a lower portion that has a first width and an upper portion that has a second width narrower than the first width. The bit line structure includes a conductive structure and an insulation structure stacked in a vertical direction. The first and second spacers are stacked on a sidewall of the lower portion of the conductive contact plug in a horizontal direction. The capping pattern covers a sidewall of the upper portion of the conductive contact plug. The first spacer directly contacts the sidewall of the lower portion of the conductive contact plug and includes air.

    Semiconductor memory device and method of fabricating the same

    公开(公告)号:US11600570B2

    公开(公告)日:2023-03-07

    申请号:US17097337

    申请日:2020-11-13

    摘要: A semiconductor memory device is disclosed. The device may include first and second impurity regions provided in a substrate and spaced apart from each other, the second impurity region having a top surface higher than the first impurity region, a device isolation pattern interposed between the first and second impurity regions, a first contact plug, which is in contact with the first impurity region and has a bottom surface lower than the top surface of the second impurity region, a gap-fill insulating pattern interposed between the first contact plug and the second impurity region, a first protection spacer interposed between the gap-fill insulating pattern and the second impurity region, and a first spacer, which is in contact with a side surface of the first contact plug and the device isolation pattern and is interposed between the first protection spacer and the gap-fill insulating pattern.

    SEMICONDUCTOR DEVICES
    9.
    发明公开

    公开(公告)号:US20230422488A1

    公开(公告)日:2023-12-28

    申请号:US18192329

    申请日:2023-03-29

    IPC分类号: H10B12/00

    摘要: A semiconductor device including a first contact plug structure on a substrate, a lower spacer structure on a sidewall of the first contact plug structure, and a bit line structure on the first contact plug structure and including a conductive structure and an insulation structure stacked in a vertical direction substantially perpendicular to an upper surface of the substrate may be provided. The first contact plug structure may include a conductive pad contacting the upper surface of the substrate, an ohmic contact pattern on the conductive pad, and a conductive filling pattern on the ohmic contact pattern. The conductive filling pattern may include metal, and include a lower portion having a relatively large width and an upper portion having a relatively small width. The lower spacer structure may contact a sidewall of the conductive filling pattern.

    SEMICONDUCTOR MEMORY DEVICES AND METHODS OF FABRICATING THE SAME

    公开(公告)号:US20230189503A1

    公开(公告)日:2023-06-15

    申请号:US17886652

    申请日:2022-08-12

    IPC分类号: H01L27/108

    摘要: A semiconductor memory device may include a substrate including active regions. Word lines may be on the active regions and may be extended in a first direction. Bit line structures may be on the word lines, and each of the bit line structures may include a contact portion, which is connected to a first impurity region of an active region, and a line portion, which is on the contact portion and which extends in a second direction. Contact plugs may be between the bit line structures and may be connected to respective second impurity regions of the active regions. Connection patterns may connect the contact plugs to the second impurity regions. Each of the connection patterns may include a first concave surface that faces the contact portion and a second convex surface that is opposite to the first surface.