- 专利标题: Thin film transistor array substrate and electronic device including the same
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申请号: US17122811申请日: 2020-12-15
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公开(公告)号: US11600677B2公开(公告)日: 2023-03-07
- 发明人: Dohyung Lee , ChanYong Jeong , JuHeyuck Baeck
- 申请人: LG Display Co., Ltd.
- 申请人地址: KR Seoul
- 专利权人: LG Display Co., Ltd.
- 当前专利权人: LG Display Co., Ltd.
- 当前专利权人地址: KR Seoul
- 代理机构: Polsinelli PC
- 优先权: KR10-2019-0167813 20191216
- 主分类号: H01L27/00
- IPC分类号: H01L27/00 ; H01L29/00 ; H01L27/32 ; H01L29/786 ; H01L29/24 ; H01L27/12
摘要:
A thin film transistor (TFT) array substrate for an electronic device includes a first active layer of a first TFT which is an oxide semiconductor layer including molybdenum, a second active layer of a second TFT which is an oxide semiconductor layer and disposed on a buffer layer to be spaced apart from the first active layer of the first TFT, a first gate insulating film overlapping the first active layer and the second active layer, a first gate electrode of the first TFT overlapping the first gate insulating film and a part of the first active layer, and a second gate electrode of the second TFT overlapping the first gate insulating film, spaced apart from the first gate electrode, and overlapping a part of the second active layer. Accordingly, the first TFT has a high subthreshold parameter, and the second TFT has high mobility.
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