- 专利标题： Dynamic electrical and fluid delivery system with indexing motion for batch processing chambers
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申请号： US17009652申请日： 2020-09-01
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公开(公告)号： US11602064B2公开(公告)日： 2023-03-07
- 发明人: Akshay Gunaji , Uday Pai , Timothy J. Roggenbuck , Sanjeev Baluja , Kalesh Panchaxari Karadi , Tejas Ulavi
- 申请人： Applied Materials, Inc.
- 申请人地址： US CA Santa Clara
- 专利权人： Applied Materials, Inc.
- 当前专利权人： Applied Materials, Inc.
- 当前专利权人地址： US CA Santa Clara
- 代理机构： Servilla Whitney LLC
- 主分类号： H05K5/02
- IPC分类号： H05K5/02 ; C23C16/455 ; H02G3/04 ; C23C16/458
摘要：
Process assemblies and cable management assemblies for managing cables in tight envelopes. A processing assembly includes a top chamber having at least one substrate support, a support shaft, a robot spindle assembly, a stator and a cable management system. The cable management system includes an inner trough assembly and an outer trough assembly configured to move relative to one another, and a plurality of chain links configured to house at least one cable for delivering power to the process assembly.
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