公开(公告)号：US20230175131A1

公开(公告)日：2023-06-08

申请号：US18103812

申请日：2023-01-31

申请人： Applied Materials, Inc.

发明人： Akshay Gunaji ,  Uday Pai ,  Timothy J. Roggenbuck ,  Sanjeev Baluja ,  Kalesh Panchaxari Karadi ,  Tejas Ulavi

IPC分类号： H05K5/02 ,  H02G3/04 ,  C23C16/458 ,  C23C16/455

CPC分类号： H05K5/0247 ,  H02G3/0437 ,  C23C16/4588 ,  C23C16/45544 ,  C23C16/4586

摘要： Process assemblies and cable management assemblies for managing cables in tight envelopes. A processing assembly includes a top chamber having at least one substrate support, a support shaft, a robot spindle assembly, a stator and a a cable management system. The cable management system includes an inner trough assembly and an outer trough assembly configured to move relative to one another, and a plurality of chain links configured to house at least one cable for delivering power to the process assembly.

公开(公告)号：US20220071037A1

公开(公告)日：2022-03-03

申请号：US17009652

申请日：2020-09-01

申请人： Applied Materials, Inc.

发明人： Akshay Gunaji ,  Uday Pai ,  Timothy J. Roggenbuck ,  Sanjeev Baluja ,  Kalesh Panchaxari Karadi ,  Tejas Ulavi

IPC分类号： H05K5/02 ,  C23C16/455 ,  C23C16/458 ,  H02G3/04

摘要： Process assemblies and cable management assemblies for managing cables in tight envelopes. A processing assembly includes a top chamber having at least one substrate support, a support shaft, a robot spindle assembly, a stator and a cable management system. The cable management system includes an inner trough assembly and an outer trough assembly configured to move relative to one another, and a plurality of chain links configured to house at least one cable for delivering power to the process assembly.

公开(公告)号：US11950384B2

公开(公告)日：2024-04-02

申请号：US18103812

申请日：2023-01-31

申请人： Applied Materials, Inc.

发明人： Akshay Gunaji ,  Uday Pai ,  Timothy J. Roggenbuck ,  Sanjeev Baluja ,  Kalesh Panchaxari Karadi ,  Tejas Ulavi

IPC分类号： H05K5/02 ,  C23C16/455 ,  C23C16/458 ,  H02G3/04

CPC分类号： H05K5/0247 ,  C23C16/45544 ,  C23C16/4588 ,  H02G3/0437 ,  C23C16/4586

摘要： Process assemblies and cable management assemblies for managing cables in tight envelopes. A processing assembly includes a top chamber having at least one substrate support, a support shaft, a robot spindle assembly, a stator and a cable management system. The cable management system includes an inner trough assembly and an outer trough assembly configured to move relative to one another, and a plurality of chain links configured to house at least one cable for delivering power to the process assembly.

公开(公告)号：US11602064B2

公开(公告)日：2023-03-07

申请号：US17009652

申请日：2020-09-01

申请人： Applied Materials, Inc.

发明人： Akshay Gunaji ,  Uday Pai ,  Timothy J. Roggenbuck ,  Sanjeev Baluja ,  Kalesh Panchaxari Karadi ,  Tejas Ulavi

IPC分类号： H05K5/02 ,  C23C16/455 ,  H02G3/04 ,  C23C16/458

摘要： Process assemblies and cable management assemblies for managing cables in tight envelopes. A processing assembly includes a top chamber having at least one substrate support, a support shaft, a robot spindle assembly, a stator and a cable management system. The cable management system includes an inner trough assembly and an outer trough assembly configured to move relative to one another, and a plurality of chain links configured to house at least one cable for delivering power to the process assembly.