Invention Grant
- Patent Title: Method of manufacturing oxide thin film transistor
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Application No.: US16876344Application Date: 2020-05-18
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Publication No.: US11605739B2Publication Date: 2023-03-14
- Inventor: Lizhong Wang , Tianmin Zhou , Hehe Hu , Shuilang Dong , Wenhua Wang , Nianqi Yao
- Applicant: BOE TECHNOLOGY GROUP CO., LTD.
- Applicant Address: CN Beijing
- Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee: BOE TECHNOLOGY GROUP CO., LTD.
- Current Assignee Address: CN Beijing
- Agency: McDermott Will & Emery LLP
- Priority: CN201910904728.X 20190924
- Main IPC: H01L29/786
- IPC: H01L29/786 ; H01L27/12 ; H01L29/49 ; H01L29/66 ; H01L21/02

Abstract:
An oxide thin film transistor includes an oxide active layer, a first loose layer and a first oxygen release layer. The first loose layer is at least disposed on a first surface of the oxide active layer perpendicular to a thickness direction of the oxide active layer, and is in contact with the oxide active layer. A material of the first loose layer includes a first inorganic oxide insulating material. The first oxygen release layer is disposed on a surface of the first loose layer facing away from the oxide active layer, and is in contact with the first loose layer. A material of the first oxygen release layer is a first oxygen-containing insulating material.
Public/Granted literature
- US20210091223A1 OXIDE THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF, AND ARRAY SUBSTRATE Public/Granted day:2021-03-25
Information query
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