Invention Grant
- Patent Title: Method for manufacturing a UV-radiation detector device based on SiC, and UV-radiation detector device based on SiC
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Application No.: US17344558Application Date: 2021-06-10
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Publication No.: US11605751B2Publication Date: 2023-03-14
- Inventor: Simone Rascuná , Gabriele Bellocchi , Paolo Badalá , Isodiana Crupi
- Applicant: STMICROELECTRONICS S.R.L.
- Applicant Address: IT Agrate Brianza
- Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee: STMICROELECTRONICS S.R.L.
- Current Assignee Address: IT Agrate Brianza
- Agency: Seed IP Law Group LLP
- Priority: IT102020000015100 20200623
- Main IPC: H01L31/10
- IPC: H01L31/10 ; H01L31/101 ; H01L31/0224 ; H01L31/103 ; H01L31/18

Abstract:
A device for detecting UV radiation, comprising: a SiC substrate having an N doping; a SiC drift layer having an N doping, which extends over the substrate; a cathode terminal; and an anode terminal. The anode terminal comprises: a doped anode region having a P doping, which extends in the drift layer; and an ohmic-contact region including one or more carbon-rich layers, in particular graphene and/or graphite layers, which extends in the doped anode region. The ohmic-contact region is transparent to the UV radiation to be detected.
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