Invention Grant
- Patent Title: Method and structure for sensors on glass
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Application No.: US17357234Application Date: 2021-06-24
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Publication No.: US11608265B2Publication Date: 2023-03-21
- Inventor: Stephan Pindl , Carsten Ahrens , Stefan Jost , Ulrich Krumbein
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Slater Matsil, LLP
- Priority: EP20185153 20200710
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B81B3/00

Abstract:
A method for providing a semiconductor layer arrangement on a substrate which comprises providing a semiconductor layer arrangement having a functional layer and a semiconductor substrate layer, attaching the semiconductor layer arrangement to a glass substrate layer such that the functional layer is arranged between the glass substrate layer and the semiconductor substrate layer, and removing the semiconductor substrate layer at least partially such that the glass substrate layer substitutes the semiconductor substrate layer as the substrate of the semiconductor layer arrangement.
Public/Granted literature
- US20220009771A1 Method and Structure for Sensors on Glass Public/Granted day:2022-01-13
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