Invention Grant
- Patent Title: Spectroscopy and imaging system
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Application No.: US16936643Application Date: 2020-07-23
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Publication No.: US11609193B2Publication Date: 2023-03-21
- Inventor: Oliver Greenwood , Adam Bushell , Michael Hugh Humpherson
- Applicant: VG Systems Limited
- Applicant Address: GB Chesire
- Assignee: VG Systems Limited
- Current Assignee: VG Systems Limited
- Current Assignee Address: GB Chesire
- Priority: GB1910880 20190730
- Main IPC: G01N23/227
- IPC: G01N23/227 ; G01N23/2273

Abstract:
An apparatus and method for characterisation of a sample via spectroscopy and/or imaging. The apparatus comprises a first detector for imaging or spectroscopy, a second detector for imaging or spectroscopy, and a toroidal capacitor type electrostatic energy analyser. The toroidal capacitor type electrostatic energy analyser comprises a first and a second entrance aperture arranged such that charged particles emitted from a sample and passing through the first entrance aperture traverse a first trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the first detector, and charged particles emitted from a sample and passing through the second entrance aperture traverse a second trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the second detector. A deflection assembly arranged between the sample and the analyser may be used to direct charged particles emitted from the sample towards the first and/or second entrance aperture of the analyser.
Public/Granted literature
- US20210033551A1 SPECTROSCOPY AND IMAGING SYSTEM Public/Granted day:2021-02-04
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