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公开(公告)号：US12099024B2
公开(公告)日：2024-09-24
申请号：US17427791
申请日：2020-03-03
Applicant: VG SYSTEMS LIMITED , FEI Company
Inventor： Austin Penrose Day , Christopher James Stephens , Pavel Stejskal , Martin Petrek
IPC: G01N23/203
CPC classification number: G01N23/203 , G01N2223/0566 , G01N2223/40
Abstract: A method of analyzing a sample imaged by electron backscatter diffraction. The method comprises identifying a plurality of Kikuchi bands in an electron backscatter diffraction image of a position on the sample. The method further comprises forming, for each identified Kikuchi band, a respective vector representation of said Kikuchi band based at least in part on an estimate of the position on the sample. A configuration of the sample is determined by identifying a particular set of expected vector representations from a plurality of sets of expected vector representations as matching the vector representations of the plurality of identified Kikuchi bands.
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公开(公告)号：US20250012742A1
公开(公告)日：2025-01-09
申请号：US18893321
申请日：2024-09-23
Applicant: VG SYSTEMS LIMITED , FEI Company
Inventor： Austin Penrose Day , Christopher James Stephens , Pavel Stejskal , Martin Petrek
IPC: G01N23/203
Abstract: A method of analyzing a sample imaged by electron backscatter diffraction. The method comprises identifying a plurality of Kikuchi bands in an electron backscatter diffraction image of a position on the sample. The method further comprises forming, for each identified Kikuchi band, a respective vector representation of said Kikuchi band based at least in part on an estimate of the position on the sample. A configuration of the sample is determined by identifying a particular set of expected vector representations from a plurality of sets of expected vector representations as matching the vector representations of the plurality of identified Kikuchi bands.
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公开(公告)号：US20220136985A1
公开(公告)日：2022-05-05
申请号：US17427791
申请日：2020-03-03
Applicant: VG SYSTEMS LIMITED , FEI Company
Inventor： Austin Penrose DAY , Christopher James STEPHENS , Pavel STEJSKAL , Martin PETREK
IPC: G01N23/203
Abstract: A method of analyzing a sample imaged by electron backscatter diffraction. The method comprises identifying a plurality of Kikuchi bands in an electron backscatter diffraction image of a position on the sample. The method further comprises forming, for each identified Kikuchi band, a respective vector representation of said Kikuchi band based at least in part on an estimate of the position on the sample. A configuration of the sample is determined by identifying a particular set of expected vector representations from a plurality of sets of expected vector representations as matching the vector representations of the plurality of identified Kikuchi bands.
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公开(公告)号：US20190285548A1
公开(公告)日：2019-09-19
申请号：US16081622
申请日：2017-02-08
Abstract: A process of analyzing a sample by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) includes providing a sample having a sample surface within a vacuum chamber, performing a Raman spectroscopic analysis on a plurality of selected areas of the sample surface within the vacuum chamber to map an area of the sample surface comprising the selected areas, the Raman spectroscopic analysis including identifying one or more face in one or more of the selected areas of the sample surface, and performing an X-ray photoelectron spectroscopy (XPS) analysis of one or more selected areas of the sample surface containing at least one chemical and/or structural feature identified by the Raman spectroscopic analysis, wherein the duration of the XPS analysis of a given selected area of the sample surface is longer than the duration of the Raman spectroscopic analysis of that given selected area.
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公开(公告)号：US20250137950A1
公开(公告)日：2025-05-01
申请号：US18930019
申请日：2024-10-29
Applicant: VG Systems Limited
Inventor： Paul Mack , Timothy Sion Nunney , Dhilan Sukunan Devadasan
IPC: G01N23/2273 , G01N31/00
Abstract: In accordance with the claimed invention, there is provided an apparatus for changing an oxidation state of a surface to be analysed of a sample, the apparatus comprising: a vacuum chamber; a sample holder inside the vacuum chamber, configured to hold a sample having a surface to be analysed; an inlet inside the vacuum chamber, configured to provide a localised supply, to the surface to be analysed, of an agent for changing an oxidation state of the surface to be analysed; and an energy source, configured to provide energy to the agent to facilitate changing the oxidation state of the surface to be analysed. There is also provided a process for changing an oxidation state of a surface to be analysed of a sample and a process for performing X-ray photoelectron spectroscopy, XPS, of a surface to be analysed of a sample.
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Patent Agency Ranking
公开(公告)号：US20180166253A1
公开(公告)日：2018-06-14
申请号：US15837587
申请日：2017-12-11
Applicant: VG Systems Limited
Inventor： Zoran PESIC , Chris STEPHENS , Austin DAY , Bryan BARNARD
CPC classification number: H01J37/224 , H01J37/222 , H01J37/244 , H01J37/28 , H01J37/295 , H01J2237/024 , H01J2237/10 , H01J2237/2443 , H01J2237/24475 , H01J2237/2804 , H01J2237/2805
Abstract: The invention relates to an image capture assembly and method for use in an electron backscatter diffraction (EBSD) system. An image capture assembly comprises a scintillation screen (10) including a predefined screen region (11), an image sensor (20) comprising an array of photo sensors and a lens assembly (30). The image capture assembly is configured to operate in at least a first configuration or a second configuration. In the first configuration the lens assembly (30) projects the predefined region (11) of the scintillation screen (10) onto the array and in the second configuration the lens assembly (30) projects the predefined region (11) of the scintillation screen (10) onto a sub-region (21) of the array. In each of the first and second configurations the field of view of the lens assembly (30) is the same.
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公开(公告)号：US11609193B2
公开(公告)日：2023-03-21
申请号：US16936643
申请日：2020-07-23
Applicant: VG Systems Limited
Inventor： Oliver Greenwood , Adam Bushell , Michael Hugh Humpherson
IPC: G01N23/227 , G01N23/2273
Abstract: An apparatus and method for characterisation of a sample via spectroscopy and/or imaging. The apparatus comprises a first detector for imaging or spectroscopy, a second detector for imaging or spectroscopy, and a toroidal capacitor type electrostatic energy analyser. The toroidal capacitor type electrostatic energy analyser comprises a first and a second entrance aperture arranged such that charged particles emitted from a sample and passing through the first entrance aperture traverse a first trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the first detector, and charged particles emitted from a sample and passing through the second entrance aperture traverse a second trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the second detector. A deflection assembly arranged between the sample and the analyser may be used to direct charged particles emitted from the sample towards the first and/or second entrance aperture of the analyser.
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公开(公告)号：US20210033551A1
公开(公告)日：2021-02-04
申请号：US16936643
申请日：2020-07-23
Applicant: VG Systems Limited
Inventor： Oliver Greenwood , Adam Bushell , Michael Hugh Humpherson
IPC: G01N23/2273
Abstract: An apparatus and method for characterisation of a sample via spectroscopy and/or imaging. The apparatus comprises a first detector for imaging or spectroscopy, a second detector for imaging or spectroscopy, and a toroidal capacitor type electrostatic energy analyser. The toroidal capacitor type electrostatic energy analyser comprises a first and a second entrance aperture arranged such that charged particles emitted from a sample and passing through the first entrance aperture traverse a first trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the first detector, and charged particles emitted from a sample and passing through the second entrance aperture traverse a second trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the second detector. A deflection assembly arranged between the sample and the analyser may be used to direct charged particles emitted from the sample towards the first and/or second entrance aperture of the analyser.
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公开(公告)号：US10816476B2
公开(公告)日：2020-10-27
申请号：US16081622
申请日：2017-02-08
Abstract: A process of analyzing a sample by Raman spectroscopy and X-ray photoelectron spectroscopy (XPS) includes providing a sample having a sample surface within a vacuum chamber, performing a Raman spectroscopic analysis on a plurality of selected areas of the sample surface within the vacuum chamber to map an area of the sample surface comprising the selected areas, the Raman spectroscopic analysis including identifying one or more face in one or more of the selected areas of the sample surface, and performing an X-ray photoelectron spectroscopy (XPS) analysis of one or more selected areas of the sample surface containing at least one chemical and/or structural feature identified by the Raman spectroscopic analysis, wherein the duration of the XPS analysis of a given selected area of the sample surface is longer than the duration of the Raman spectroscopic analysis of that given selected area.
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公开(公告)号：US10692689B2
公开(公告)日：2020-06-23
申请号：US15837587
申请日：2017-12-11
Applicant: VG Systems Limited
Inventor： Zoran Pesic , Chris Stephens , Austin Day , Bryan Barnard
IPC: G01T1/164 , H01J37/22 , H01J37/244 , H01J37/295 , H01J37/28
Abstract: The invention relates to an image capture assembly and method for use in an electron backscatter diffraction (EBSD) system. An image capture assembly comprises a scintillation screen (10) including a predefined screen region (11), an image sensor (20) comprising an array of photo sensors and a lens assembly (30). The image capture assembly is configured to operate in at least a first configuration or a second configuration. In the first configuration the lens assembly (30) projects the predefined region (11) of the scintillation screen (10) onto the array and in the second configuration the lens assembly (30) projects the predefined region (11) of the scintillation screen (10) onto a sub-region (21) of the array. In each of the first and second configurations the field of view of the lens assembly (30) is the same.
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