公开(公告)号：US11609193B2

公开(公告)日：2023-03-21

申请号：US16936643

申请日：2020-07-23

Applicant: VG Systems Limited

Inventor： Oliver Greenwood ,  Adam Bushell ,  Michael Hugh Humpherson

IPC: G01N23/227 ,  G01N23/2273

Abstract: An apparatus and method for characterisation of a sample via spectroscopy and/or imaging. The apparatus comprises a first detector for imaging or spectroscopy, a second detector for imaging or spectroscopy, and a toroidal capacitor type electrostatic energy analyser. The toroidal capacitor type electrostatic energy analyser comprises a first and a second entrance aperture arranged such that charged particles emitted from a sample and passing through the first entrance aperture traverse a first trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the first detector, and charged particles emitted from a sample and passing through the second entrance aperture traverse a second trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the second detector. A deflection assembly arranged between the sample and the analyser may be used to direct charged particles emitted from the sample towards the first and/or second entrance aperture of the analyser.

公开(公告)号：US20210033551A1

公开(公告)日：2021-02-04

申请号：US16936643

申请日：2020-07-23

Applicant: VG Systems Limited

Inventor： Oliver Greenwood ,  Adam Bushell ,  Michael Hugh Humpherson

IPC: G01N23/2273

Abstract: An apparatus and method for characterisation of a sample via spectroscopy and/or imaging. The apparatus comprises a first detector for imaging or spectroscopy, a second detector for imaging or spectroscopy, and a toroidal capacitor type electrostatic energy analyser. The toroidal capacitor type electrostatic energy analyser comprises a first and a second entrance aperture arranged such that charged particles emitted from a sample and passing through the first entrance aperture traverse a first trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the first detector, and charged particles emitted from a sample and passing through the second entrance aperture traverse a second trajectory through the toroidal capacitor type electrostatic energy analyser to be incident at the second detector. A deflection assembly arranged between the sample and the analyser may be used to direct charged particles emitted from the sample towards the first and/or second entrance aperture of the analyser.