- 专利标题: Semiconductor memory device
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申请号: US17184094申请日: 2021-02-24
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公开(公告)号: US11610912B2公开(公告)日: 2023-03-21
- 发明人: Hidenobu Nagashima
- 申请人: KIOXIA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: KIOXIA CORPORATION
- 当前专利权人: KIOXIA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, McClelland, Maier & Neustadt, L.L.P.
- 优先权: JPJP2018-052449 20180320
- 主分类号: H01L27/11575
- IPC分类号: H01L27/11575 ; H01L27/11573 ; H01L21/762 ; H01L27/11565 ; H01L23/535 ; H01L21/768 ; H01L27/11582 ; H01L21/311
摘要:
According to one embodiment, a semiconductor memory device includes a stacked body, memory pillars, first and second insulation layers and an isolation region. The stacked body above a substrate includes conductive layers isolated from each other and stacked along a first direction crossing the substrate surface. The memory pillars extend through the stacked body along the first direction. The first insulation layer is provided above the memory pillars. The isolation region is provided higher than upper surfaces of the memory pillars in the stacked body along the first direction, and isolates the stacked body in a second direction crossing the first direction. The second insulation layer is provided on the first insulation layer and a side wall of the isolation region.
公开/授权文献
- US20210183881A1 SEMICONDUCTOR MEMORY DEVICE 公开/授权日:2021-06-17
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