Invention Grant
- Patent Title: Silicon-oxide-nitride-oxide-silicon (SONOS) memory cell and forming method thereof
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Application No.: US17177164Application Date: 2021-02-16
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Publication No.: US11621271B2Publication Date: 2023-04-04
- Inventor: Chia-Ching Hsu
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Hsin-Chu
- Agent Winston Hsu
- Main IPC: H01L21/28
- IPC: H01L21/28 ; H01L27/1157 ; H01L29/792 ; H01L29/423 ; H01L29/66

Abstract:
A silicon-oxide-nitride-oxide-silicon (SONOS) memory cell includes a memory gate, a dielectric layer, two charge trapping layers and two selective gates. The memory gate is disposed on a substrate. The two charge trapping layers are at two ends of the dielectric layer, and the charge trapping layers and the dielectric layer are sandwiched by the substrate and the memory gate. The two selective gates are disposed at two opposite sides of the memory gate, thereby constituting a two bit memory cell. The present invention also provides a method of forming said silicon-oxide-nitride-oxide-silicon (SONOS) memory cell.
Public/Granted literature
- US20220262806A1 SILICON-OXIDE-NITRIDE-OXIDE-SILICON (SONOS) MEMORY CELL AND FORMING METHOD THEREOF Public/Granted day:2022-08-18
Information query
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