- 专利标题： Optical probe, optical probe array, test system and test method
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申请号： US17039878申请日： 2020-09-30
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公开(公告)号： US11624679B2公开(公告)日： 2023-04-11
- 发明人: Michitaka Okuta , Yuki Saito , Toshinaga Takeya , Shou Harako , Jukiya Fukushi , Minoru Sato , Hisao Narita
- 申请人： Kabushiki Kaisha Nihon Micronics
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Nihon Micronics
- 当前专利权人： Kabushiki Kaisha Nihon Micronics
- 当前专利权人地址： JP Tokyo
- 代理机构： Lorenz & Kopf, LLP
- 优先权： JPJP2019-183669 20191004
- 主分类号： G01M11/02
- IPC分类号： G01M11/02 ; G01R1/073 ; G01R31/26 ; H01S5/00
摘要：
An optical probe receives an optical signal output from a test subject. The optical probe includes an optical waveguide composed of a core portion and a cladding portion disposed on an outer periphery of the core portion, wherein an incident surface of the optical waveguide, which receives the optical signal, is a convex spherical surface with a constant curvature radius.