- 专利标题: Custom photolithography masking via precision dispense process
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申请号: US17002605申请日: 2020-08-25
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公开(公告)号: US11626286B1公开(公告)日: 2023-04-11
- 发明人: Jenny Calubayan , Richard Korneisel , Nathaniel P. Wyckoff , Brandon C. Hamilton , Kyle B. Snyder
- 申请人: Rockwell Collins, Inc.
- 申请人地址: US IA Cedar Rapids
- 专利权人: Rockwell Collins, Inc.
- 当前专利权人: Rockwell Collins, Inc.
- 当前专利权人地址: US IA Cedar Rapids
- 代理机构: Suiter Swantz pc llo
- 主分类号: G03F7/00
- IPC分类号: G03F7/00 ; G03F7/22 ; H01L21/02 ; G03F1/00 ; G03F9/00 ; G03F7/20 ; H01L21/027
摘要:
Systems and methods for custom photolithography masking via a precision dispense apparatus and process are disclosed. Methods include creating a toolpath instruction for depositing opaque onto a substrate, programming a precision dispense apparatus to execute the created toolpath instruction, and causing the precision dispense tool to deposit opaque material onto the substrate to form the photomask. The substrate may be an optically transparent plate or film or may be an electronic substrate where the opaque material is deposited directly onto a photoresist coating. Capabilities of the systems and methods disclosed herein extend to 3D substrates and custom photolithography masking, among others.
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