- 专利标题: Negative type photosensitive composition curable at low temperature
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申请号: US15999429申请日: 2017-01-20
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公开(公告)号: US11630390B2公开(公告)日: 2023-04-18
- 发明人: Motoki Misumi , Daishi Yokoyama , Katsuto Taniguchi , Masahiro Kuzawa
- 申请人: AZ Electronic Materials (Luxembourg) S.a.r.l.
- 申请人地址: LU Luxembourg
- 专利权人: AZ Electronic Materials (Luxembourg) S.a.r.l.
- 当前专利权人: AZ Electronic Materials (Luxembourg) S.a.r.l.
- 当前专利权人地址: LU Luxembourg
- 代理机构: Faegre Drinker Biddle & Reath LLP
- 优先权: JPJP2016-030242 20160219
- 国际申请: PCT/EP2017/000071 WO 20170120
- 国际公布: WO2017/140409 WO 20170824
- 主分类号: G03F7/075
- IPC分类号: G03F7/075 ; G03F7/30 ; G03F7/004 ; G03F7/038 ; G03F7/40
摘要:
To provide a negative type photosensitive composition curable at a low temperature and capable of forming a cured film excellent in transparency, in chemical resistance and in environmental durability, and also to provide a pattern-formation method employing the composition. [Means] The present invention provides a negative type photosensitive composition comprising: an alkali-soluble resin, a compound having two or more (meth)acryloyloxy groups, a polysiloxane, a polymerization initiator, and a solvent. The alkali-soluble resin is a polymer comprising a carboxyl-containing polymerization unit and an alkoxysilyl-containing polymerization unit.
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