Invention Grant
- Patent Title: Deposition apparatus and deposition method using the same
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Application No.: US17163335Application Date: 2021-01-29
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Publication No.: US11637001B2Publication Date: 2023-04-25
- Inventor: Kwan Yong Lee , Yong Kuk Kim , Ji Hoon Shin , Chang Jo Lee , Sung Ryul Cho , Sang Jin Ha
- Applicant: Samsung Display Co., LTD.
- Applicant Address: KR Yongin-si
- Assignee: Samsung Display Co., LTD.
- Current Assignee: Samsung Display Co., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: Cantor Colburn LLP
- Priority: KR10-2020-0064080 20200528
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C14/34 ; C23C14/35

Abstract:
A deposition apparatus includes a shield member having a lattice shape in a plan view, the lattice shape including short side edges extending along a first direction and long side edges extending along a second direction, the short side edges including first and second short side edges, a bracket member including a first bracket member coupled to the first short side edge, and a second bracket member coupled to the second short side edge, a plurality of anode bars extending along the second direction and stably placed on each of the first bracket member and the second bracket member, and a target member covering the plurality of anode bars. An anode bar of the plurality of anode bars protrudes outward beyond at least one of the first bracket member and the second bracket member, and the anode bar is physically separated from the shield member by the bracket member.
Public/Granted literature
- US20210375595A1 DEPOSITION APPARATUS AND DEPOSITION METHOD USING THE SAME Public/Granted day:2021-12-02
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