Invention Grant
- Patent Title: Integrated circuit device having redistribution pattern
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Application No.: US16846616Application Date: 2020-04-13
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Publication No.: US11640951B2Publication Date: 2023-05-02
- Inventor: Yunrae Cho , Jinyeol Yang , Jungmin Ko , Seungduk Baek
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2019-0109414 20190904
- Main IPC: H01L23/00
- IPC: H01L23/00 ; H01L25/065

Abstract:
An integrated circuit device includes a wiring structure, first and second inter-wiring insulating layers, redistributions patterns and a cover insulating layer. The wiring structure includes wiring layers having a multilayer wiring structure and via plugs. The first inter-wiring insulating layer that surrounds the wiring structure on a substrate. The second inter-wiring insulating layer is on the first inter-wiring insulating layer, and redistribution via plugs are connected to the wiring structure through the second inter-wiring insulating layer. The redistribution patterns includes pad patterns and dummy patterns on the second inter-wiring insulating layer. Each patterns has a thickness greater than a thickness of each wiring layer. The cover insulating layer covers some of the redistribution patterns. The dummy patterns are in the form of lines that extend in a horizontal direction parallel to the substrate.
Public/Granted literature
- US20210066231A1 INTEGRATED CIRCUIT DEVICE HAVING REDISTRIBUTION PATTERN Public/Granted day:2021-03-04
Information query
IPC分类: