Invention Grant
- Patent Title: Memory array comprising strings of memory cells and method used in forming a memory array comprising strings of memory cells
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Application No.: US17162062Application Date: 2021-01-29
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Publication No.: US11641737B2Publication Date: 2023-05-02
- Inventor: Alyssa N. Scarbrough , John D. Hopkins
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Wells St. John P.S.
- Main IPC: H01L27/11556
- IPC: H01L27/11556 ; H01L27/11582 ; H01L21/48 ; H01L23/522 ; G11C5/06

Abstract:
A method used in forming a memory array comprising strings of memory cells comprises forming a stack comprising vertically-alternating first tiers and second tiers. The stack comprises laterally-spaced memory-block regions. Simultaneously, (a), (b), and (c) are formed, where (a): horizontally-elongated trenches into the stack laterally-between immediately-laterally-adjacent of the memory-block regions; (b): channel openings into the stack laterally-between the horizontally-elongated trenches; and (c): through-array-via (TAV) openings into the stack in a stair-step region. Intervening material is formed in the horizontally-elongated trenches, a channel-material string in individual of the channel openings, and conductive material in the TAV openings. Other aspects, including structure independent of method, are disclosed.
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