Invention Grant
- Patent Title: Plasma processing apparatus
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Application No.: US16207434Application Date: 2018-12-03
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Publication No.: US11643727B2Publication Date: 2023-05-09
- Inventor: Akira Kagoshima , Daisuke Shiraishi , Yuji Nagatani
- Applicant: HITACHI HIGH-TECH CORPORATION
- Applicant Address: JP Tokyo
- Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee: HITACHI HIGH-TECH CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge, P.C.
- Priority: JP 14239439 2014.11.27
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/52 ; C23C16/50

Abstract:
A plasma processing apparatus, to which process control such as APC is applied, includes: a processing chamber in which plasma processing is performed on a sample; and a plasma processing control device which performs control to optimize a condition for plasma processing which recovers the status inside a processing chamber, in which plasma processing is performed, based on a waiting time from the time when plasma processing for a second lot, which is a lot immediately before a first lot, is completed to the time when plasma processing for the first lot is started, and the content of plasma processing for the second lot.
Public/Granted literature
- US20190100840A1 PLASMA PROCESSING APPARATUS Public/Granted day:2019-04-04
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