Invention Grant
- Patent Title: Crucible and SiC single crystal growth apparatus
-
Application No.: US16391556Application Date: 2019-04-23
-
Publication No.: US11643749B2Publication Date: 2023-05-09
- Inventor: Yohei Fujikawa
- Applicant: SHOWA DENKO K.K.
- Applicant Address: JP Tokyo
- Assignee: SHOWA DENKO K.K.
- Current Assignee: SHOWA DENKO K.K.
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP 2018085805 2018.04.26
- Main IPC: C23C14/24
- IPC: C23C14/24 ; C23C14/06 ; C30B23/06 ; C30B29/36

Abstract:
The present invention provides a crucible and a SiC single crystal growth apparatus capable of improving the efficiency of using source materials. The crucible includes a lid and a container. The container includes a bottom facing the lid. The bottom includes a recess which is recessed towards the lid.
Public/Granted literature
- US20190330764A1 CRUCIBLE AND SiC SINGLE CRYSTAL GROWTH APPARATUS Public/Granted day:2019-10-31
Information query
IPC分类: