Invention Grant
- Patent Title: Bonded semiconductor die assembly with metal alloy bonding pads and methods of forming the same
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Application No.: US17167161Application Date: 2021-02-04
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Publication No.: US11646282B2Publication Date: 2023-05-09
- Inventor: Lin Hou , Peter Rabkin , Masaaki Higashitani
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L23/48
- IPC: H01L23/48 ; H01L23/00 ; H01L25/18 ; H01L25/00 ; H01L25/065

Abstract:
A bonded assembly includes a first semiconductor die and a second semiconductor die. The first semiconductor die includes first metallic bonding pads embedded in first dielectric material layers, the second semiconductor die includes second metallic bonding pads embedded in second dielectric material layers, the first metallic bonding pads are bonded to a respective one of the second metallic bonding pads; and each of the first metallic bonding pads includes a corrosion barrier layer containing an alloy of a primary bonding metal and at least one corrosion-suppressing element that is different from the primary bonding metal.
Public/Granted literature
- US20220246562A1 BONDED SEMICONDUCTOR DIE ASSEMBLY WITH METAL ALLOY BONDING PADS AND METHODS OF FORMING THE SAME Public/Granted day:2022-08-04
Information query
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