- 专利标题: Wafer testing and structures for wafer testing
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申请号: US16941422申请日: 2020-07-28
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公开(公告)号: US11650249B1公开(公告)日: 2023-05-16
- 发明人: Yan Wang , Nui Chong
- 申请人: XILINX, INC.
- 申请人地址: US CA San Jose
- 专利权人: XILINX, INC.
- 当前专利权人: XILINX, INC.
- 当前专利权人地址: US CA San Jose
- 代理机构: Patterson + Sheridan, LLP
- 主分类号: G01R31/3185
- IPC分类号: G01R31/3185 ; G01R31/28 ; G01R3/00
摘要:
Examples described herein generally relate to wafer testing and structures implemented on a wafer for wafer testing. In an example method for testing a wafer, power is applied to a first pad in a test site (TS) region on the wafer. The TS region is electrically connected to a device under test (DUT) region on the wafer. The DUT region includes a DUT. The TS region and DUT region are in a first and second scribe line, respectively, on the wafer. A third scribe line is disposed on the wafer between the TS region and the DUT region. A signal is detected from a second pad in the TS region on the wafer. The signal is at least in part a response of the DUT to the power applied to the first pad.
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