Invention Grant
- Patent Title: Optical device
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Application No.: US16762174Application Date: 2018-09-04
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Publication No.: US11650411B2Publication Date: 2023-05-16
- Inventor: Tatsuya Sugimoto , Tomofumi Suzuki , Kyosuke Kotani
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JP 2017220237 2017.11.15
- International Application: PCT/JP2018/032760 2018.09.04
- International Announcement: WO2019/097818A 2019.05.23
- Date entered country: 2020-05-07
- Main IPC: G02B26/08
- IPC: G02B26/08 ; G02B7/182 ; H02N1/00 ; G02B26/10 ; B81C1/00

Abstract:
In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.
Public/Granted literature
- US11693230B2 Optical device Public/Granted day:2023-07-04
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