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    Optical module
    2.
    发明授权
    Optical module 有权

    公开(公告)号：US11579438B2

    公开(公告)日：2023-02-14

    申请号：US16492684

    申请日：2018-03-14

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tomofumi Suzuki ,  Tatsuya Sugimoto ,  Kyosuke Kotani

    IPC: G02B26/00 ,  G02B26/08 ,  B81B3/00 ,  G01J3/453 ,  G01N21/35 ,  G02B5/08 ,  G02B5/124 ,  G02B26/06

    Abstract: An optical module includes a support layer, a device layer which is provided on the support layer, and a movable mirror which is mounted in the device layer. The device layer has a mounting region in which the movable mirror is mounted, and a driving region which is connected to the mounting region. A space corresponding to at least the mounting region and the driving region is formed between the support layer and the device layer. The mounting region is disposed between a pair of elastic support regions included in the driving region and is supported by the pair of elastic support regions.

    OPTICAL MODULE
    4.
    发明申请
    OPTICAL MODULE 有权

    公开(公告)号：US20210278274A1

    公开(公告)日：2021-09-09

    申请号：US17321716

    申请日：2021-05-17

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tomofumi SUZUKI ,  Kyosuke Kotani ,  Tatsuya Sugimoto

    IPC: G01J3/14 ,  B81B3/00 ,  G01J3/02 ,  G01J3/10 ,  G01J3/45 ,  G01B9/02 ,  G02B7/182 ,  G02B26/08 ,  G02B27/14

    Abstract: An optical module includes a mirror unit and a beam splitter unit. The mirror unit includes a base with a main surface, a movable mirror, a first fixed mirror, and a drive unit. The beam splitter unit constitutes a first interference optical system for measurement light along with the movable mirror and the first fixed mirror. A mirror surface of the movable mirror and a mirror surface of the first fixed mirror follow a plane parallel to the main surface and face one side in a first direction perpendicular to the main surface. The movable mirror, the drive unit, and at least a part of an optical path between the beam splitter unit and the first fixed mirror are disposed in an airtight space.

    Optical device
    7.
    发明授权
    Optical device 有权

    公开(公告)号：US11703679B2

    公开(公告)日：2023-07-18

    申请号：US16625695

    申请日：2018-07-06

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

    IPC: G02B26/08 ,  B81B3/00

    CPC classification number: G02B26/0841 ,  B81B2201/04 ,  B81B2203/0118 ,  B81B2203/0136 ,  B81B2203/0154

    Abstract: An optical device includes an elastic support portion which includes a torsion bar which extends along a second direction perpendicular to a first direction and a nonlinearity relaxation spring which is connected between the torsion bar and a movable portion. The nonlinearity relaxation spring is configured so that a deformation amount of the nonlinearity relaxation spring around the second direction is smaller than a deformation amount of the torsion bar around the second direction and a deformation amount of the nonlinearity relaxation spring in a third direction perpendicular to the first direction and the second direction is larger than a deformation amount of the torsion bar in the third direction while the movable portion moves in the first direction. A comb electrode is disposed along an outer edge of the movable portion.

    Optical device
    9.
    发明授权
    Optical device 有权

    公开(公告)号：US11681121B2

    公开(公告)日：2023-06-20

    申请号：US17506023

    申请日：2021-10-20

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

    IPC: G02B26/08 ,  G02B7/182

    CPC classification number: G02B7/182 ,  G02B26/0833

    Abstract: In an optical device, a movable unit includes a main body portion, a frame portion that surrounds the main body portion with a predetermined interval from the main body portion, and a plurality of connection portions which connect the main body portion and the frame portion to each other. A width of each of the connection portions is larger than an interval between the main body portion and the frame portion, and is smaller than a distance from a connection position with each of the connection portions in the frame portion to any of a connection position with each of a pair of first torsion support portions and a connection position with each of a pair of second torsion support portions.

    Optical device
    10.
    发明授权
    Optical device 有权

    公开(公告)号：US11650411B2

    公开(公告)日：2023-05-16

    申请号：US16762174

    申请日：2018-09-04

    Applicant: HAMAMATSU PHOTONICS K.K.

    Inventor： Tatsuya Sugimoto ,  Tomofumi Suzuki ,  Kyosuke Kotani

    IPC: G02B26/08 ,  G02B7/182 ,  H02N1/00 ,  G02B26/10 ,  B81C1/00

    CPC classification number: G02B26/0841 ,  B81C1/00555 ,  G02B7/1821 ,  G02B26/105 ,  H02N1/008 ,  B81B2201/042 ,  B81C2201/013 ,  B81C2201/0174 ,  B81C2201/0198

    Abstract: In an optical device, when viewed from a first direction, first, second, third, and fourth movable comb electrodes are respectively disposed between a first support portion and a first end of a movable unit, between a second support portion and a second end of the movable unit, between a third support portion and the first end, and between a fourth support portion and the second end of the movable unit. The first and second support portions respectively include first and second rib portions formed so that the thickness of each of the first and second support portions becomes greater than the thickness of the first torsion bar. The third and fourth support portions respectively include third and fourth rib portions formed so that the thickness of each of the third and fourth support portions becomes greater than the thickness of the second torsion bar.

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