Invention Grant
- Patent Title: Vertical memory devices with bending prevention layers
-
Application No.: US16834168Application Date: 2020-03-30
-
Publication No.: US11652068B2Publication Date: 2023-05-16
- Inventor: Sunil Shim
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: F. Chau & Associates, LLC
- Priority: KR 20190074144 2019.06.21
- Main IPC: H01L27/11573
- IPC: H01L27/11573 ; H01L27/1157 ; H01L23/00 ; H01L23/535 ; H01L27/11524 ; H01L27/11529 ; H01L27/11556 ; H01L27/11582

Abstract:
A vertical memory device including: a circuit pattern on a first substrate; an insulating interlayer on the first substrate, the insulating interlayer covering the circuit pattern; a bending prevention layer on the insulating interlayer, the bending prevention layer extending in a first direction substantially parallel to an upper surface of the first substrate; a second substrate on the bending prevention layer; gate electrodes spaced apart from each other in a second direction on the second substrate, the second direction being substantially perpendicular to the upper surface of the first substrate; and a channel extending through the gate electrodes in the second direction.
Information query
IPC分类: