Invention Grant
- Patent Title: Interconnection structure of an integrated circuit
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Application No.: US17112842Application Date: 2020-12-04
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Publication No.: US11653577B2Publication Date: 2023-05-16
- Inventor: Jean-Philippe Reynard , Sylvie Del Medico , Philippe Brun
- Applicant: STMicroelectronics (Crolles 2) SAS , Commissariat A L'Energie Atomique Et Aux Energies Alternatives
- Applicant Address: FR Crolles
- Assignee: STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee: STMICROELECTRONICS (CROLLES 2) SAS
- Current Assignee Address: FR Crolles
- Agency: Seed IP Law Group LLP
- Priority: FR 13902 2019.12.06
- Main IPC: H01L45/00
- IPC: H01L45/00 ; H01L43/02 ; H01L43/12 ; H01L27/22 ; H01L27/24

Abstract:
A method for manufacturing an interconnection structure for an integrated circuit is provided. The integrated circuit includes a first insulating layer, a second insulating layer, and a third insulating layer. Electrical contacts pass through the first insulating layer, and a component having an electrical contact region is located in the second insulating layer. The method includes etching a first opening in the third layer, vertically aligned with the contact region. A fourth insulating layer is deposited to fill in the opening, and a second opening is etched to the contact region by passing through the opening in the third insulating layer. A metal level is formed by filling in the second opening with a metal.
Public/Granted literature
- US20210175422A1 INTERCONNECTION STRUCTURE OF AN INTEGRATED CIRCUIT Public/Granted day:2021-06-10
Information query
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