Invention Grant
- Patent Title: Method for producing phosphor panel, phosphor panel, image intensifier and scanning-type electronic microscope
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Application No.: US17430019Application Date: 2019-11-22
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Publication No.: US11658003B2Publication Date: 2023-05-23
- Inventor: Yasumasa Hamana , Hiroyuki Watanabe , Kenshi Shimano , Hiroji Nishizawa
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu
- Agency: Faegre Drinker Biddle & Reath LLP
- Priority: JP 2019028122 2019.02.20
- International Application: PCT/JP2019/045826 2019.11.22
- International Announcement: WO2020/170532A 2020.08.27
- Date entered country: 2021-08-11
- Main IPC: H01J37/22
- IPC: H01J37/22 ; H01J9/22
Abstract:
A method of manufacturing a phosphor panel includes: forming a phosphor layer having a plurality of phosphor particles on an exit window; forming an organic film on the phosphor layer; forming a metal reflection film on the organic film; forming an oxide film on the metal reflection film; removing the organic film by firing; and forming an oxide film integrally covering a surface of the metal reflection film and surfaces of the phosphor particles by atomic layer deposition.
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